-40%
Rudolph Auto El III 2, 4A Ellipsometer/FTM AutoEl 3
$ 2639.99
- Description
- Size Guide
Description
Rudolph Auto El III EllipsometerComes with a manual and what you see in the pictures. If you don't see it, you probably wont get it.
Specifications are from a 3rd party and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
This unit was removed from service in working condition. The laser turns on. The display is really dim and hard to read in direct light. It is being sold as-is. There is a cable by the microscope that does not look correct.
The Unit's Serial Number Tag Reads:
Model Number:
III 2, 4A
Serial Number:
7329
Power Requirements:
115 V, 50/60 Hz 130 W.
Date of Manufacture:
January 13, 1983
Options Installed:
Option 2:
Sample Stage
Option 2 sample stage has vertical adjustments plus two-axis tilt adjustments, plus two calibrated orthogonal translations in the plane of the sample. Translation range 1" (2.54 cm), resolution 0.001" (0.025mm) in both directions.
Option 4A:
Microspot Optics
Spot Size: 0.001" (25µ)
The optional microspot optics are designed to be attached by the user to the polarizer module. Note that, although the beam cross-section is circulator, the obliquely-illuminated sample area is elliptical - e.g., at 70° angle of incidence, the minor and major axes of the spot are 0.001" and 0.003" respectively.
Description:
The Rudolph Auto El III Ellipsometer displays film thickness, index, order thickness, substrate N and K. It has a built in printer as well.
Specifications:
Operating Principle:
Null seeking
Operating Wavelength:
632.8 nm
Resolution & Accuracy:
Polarizer or Analyzer:
0.05°
DELTA:
0.1°
PSI:
0.05°
Resolution and accuracy of measured film thickness and film or substrate refractive index depends on the film-substrate system and the film thickness. 3 to 10 Angstroms and 0.01 refractive index units are typical of silicon oxide films on silicon
Angle of Incidence:
Standard Pin Locations 70° ± 0.02° and 90° ±0.02°
Measuring Time:
Single Film:
15 seconds (typically)
Double Film:
20 seconds (typically)
Display:
Displays film thickness, index, order thickness, substrate N and K as well as prompting messages to the operator.
Digital Output:
Serial ASCII, RS-232. Rudolph and SEMI Communication Standards
Maximum Sample Size and Mounting Plate:
6" x 6" (15.2 cm x 15.2 cm). Horizontal with vacuum hold down (vacuum source is not supplied)
Standard Equipment:
Sample Stage:
The standard sample stage has vertical adjustment plus tilt adjustments about vertex of angle of incidence and about axis formed by intersection of plane of incidence with plane of sample (Option 2 might change this)
Data Reduction:
Provides an integral library of unique programs and is easily upgradeable as future programs become available
Autocollimator/Microscope:
Microscope magnification 9X. Field of view 15 mm. Internal light source for normal incidence sample illumination.
Thermal Printer:
Built-in. Dot-matrix format. Alpha-numeric.
Dimensions:
Without laser head:
17 3/8" H x 21 1/4" D x 21 1/2" W
With laser head:
17 3/8" H x 21 1/4" D x 27 1/2" W
Weight:
87 lbs. (39 kg.) - does not include packaging for shipment.
.00 minimum for packaging, handling, and order processing. Shipping to be determined by destination.
Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.:
(1) Are you the end-user of this item?
(2) If you are not the ultimate end-user of the item, please state the ultimate end user's name.
(3) What is the ultimate country destination?
03/07/14