-40%
KLA-Tencor Prometrix UV-1050 Thin Film Measurement System
$ 36696
- Description
- Size Guide
Description
KLA-TENCOR UV-1050 THIN FILM MEASUREMENT SYSTEM consisting of:- Model: Prometrix UV-1050
- Thin Film Measurement Tool
- Broadband UV Optics
- Dual Beam Spectrophotometry
- Wafer Sizes: 100, 125, 150, and 200mm
- Stage Resolution: xy - 0.25μm, z - 0.025μm
- Focus: Automatic Focus on Measurement
Site
- Source: Broadband Xenon Arc Lamp
- Imaging System: Color Camera
- Applications include Polysilicon, UV Reflectivity, and Simultaneous Oxide and TiN Thickness for CMP Applications
- Windows NT
- Summit Software with GUI
- Simultaneous Multilayer and ESML Measures over 500 Discrete Wavelengths
- SECS II Interface
- Sold "As-Is Condition"
- Available for Inspection with Appointment
- Please contact us if you have any questions --- Tel #: 678-321-SEMI / email:
[email protected]
- Asset # 1619053603